Instant Plasma Generator

Get in control of your plasma using microsecond-level control of the RF source waveform using our Instant Plasma Generator.

Enter the Next Generation of Atomic-scale Plasma Etch and Deposition Processing by obtaining Control of the widest Window of Plasma Condition. Prodrive Technologies Introduces Solid-State Technology, replacing Mechanical Matchboxes which are challenged compensating for Varying Plasma Load conditions.

The Instant Plasma Generator offers new standards for Plasma Wafer Ignition and stabilization, utilizing high speed pulsing and near-arbitrary envelope control while maintaining accurate power delivery.

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Single box solution

Single Box Solution instead of multiple subsystems.
No matchbox required

Eliminates use of slow and unprecise matchboxes.
No frequency tuning required

Saves installation, Setup and Matching Time.
High efficiency

Achieve elimination of system losses by making matchboxes and cables obsolete.
Microsecond-level output power settling

Control the plasma near real-time, microseconds.
Advanced control mechanism

The generator control is optimized for use with plasma loads.

Features

Microsecond-level waveform control
Integrated IV sensor
Dynamic high speed (multi-level) pulsing
Multiple control modes
Programmable (locked) phase
Common Exciter synchronization (CEX)
EtherCAT
DC-bias measurement support
Arc management support

Benefits

Improved process control

Microsecond-level control ensures that processes run stable and provide optimal diagnostics.
Reduced system complexity

Remove matchboxes, matchbox controllers and other external sensors by using a single box solution.
Reduce process drift

Reduce process drift with very fast and stable RF generation with integrated sensors.
Enhanced system effiency

By optimized the effiency with fewer inbetween components, the system efficiency is enhanced.

Application Areas

Market & Industries

Semiconductor

Comprehensive solutions for computing, power conversion, motion & mechatronics, imaging & sensing systems and controls
Flat panel display

Components and solutions for LED, LCD, DLP, plasma and LCD displays

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